Full Text Searchable PDF User Manual
CPS:Doc 20017 V1 24/01/2012
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Issue 1 24/01/2012
Spectrum House Finmere Road Eastbourne E.Sussex BN22 8QL UK
Tel: +44 (1) 323 639974 Fax:+44 (1) 323 739654
E-mail : sales@coaxialpower.com Web: www.coaxialpower.com
Model RFG 4K 13-27MHz 5U
RF Generator
INSTALLATION AND OPERATING INSTRUCTIONS
CONTENTS
Description
Page 2
Specification
Page 3
Safety
Page 4
Unpacking
Page 5
Installation
Page 5
Front Panel Controls
Page 7
Display
Page 8
Interlock Indicators
Page 9
Remote Control Connector
Page 10
Remote Status Connections/Functions
Page 11
Remote Switching and Power Control
Page 12
Remote Interlock Connection/Function
Page 13
Auxiliary Feedback Connection/Function
Page 14
Pulse Operation
Page15
Fuse Replacement
Page 15
Cleaning
Page 15
Warranty
Page 15
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oaxial Power Systems Ltd
Spectrum House, Finmere Road, Eastbourne, E. Sussex, BN22 8QL
Tel: +44(0)1323 639974 Fax: +44(0)1323 739654
E-mail: sales@coaxialpower.com Web: www.coaxialpower.com
High Efficiency RF Generator
Model RFG4K-13, 4000 Watts at 13.56MHz
Model RFG4K-27, 4000 Watts at 27.12MHz
The high efficiency range
of RF generators are precision units intended for scientific and
industrial applications. Their robust construction using the latest in switch mode and
solid-state design techniques ensure a long and trouble free life even in harsh
environments.
The small size of the unit makes it ideal for use where there is restricted rack space.
It is recommended that the generator be used in conjunction with either a manual or automatic
impedance matching network. Both types are available from Coaxial Power Systems Ltd
–
please see the separate brochure for details.
Two models are available:
Model No RFG4K-13, 4000 Watts at 13.56MHz
Model Mo RFG4K-27, 4000 Watts at 27.12MHz
The main features of all models are:
Efficient Class-E design
Full-rack, 5U (222mm) high
Microprocessor display of incident (forward) power, reflected power and unit
status
Precision power control +/- 1% of set point.
Fast pulse operation from TTL/CMOS input.
13.56MHz and 27.12MHz frequencies available as standard.
The output power of each generator is fully adjustable between zero and maximum
power. The feedback control system ensures that the set output power remains constant
and repeatable. Incident (forward) and reflected power measurements are internally
calibrated to give high accuracy throughout the power range.
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An external voltage of 0 to 5Volts can be used to control the output. This is particularly
useful in sputter coating applications where the d.c. voltage developed across the
plasma dark space can be controlled rather than the RF power.
General Specifications
– RFG4K-13 and RFG4K-27 RF Generators
Output frequency
RFG4K-13, 13.56MHz.
RFG4K-27, 27.12MHz.
Output power
4000Watts
Frequency stability
Crystal controlled:
13.56MHz +/-1.4kHz
27.12MHz +/-2.7kHz
Output impedance
50
Output connection
7/16 type/50
Power control
Analogue control system
allows power or external
feedback control. Output
stability is +/-1% for +/-15%
variation in line.
VSWR capability
Can withstand any VSWR at
any phase angle
Harmonic output
Better than 40dB below
fundamental
Output envelope
ripple
Less than 1% of full
amplitude
Pulse operation
SMA TTL input on rear
panel.
Minimum pulse width 40
s.
The external power control
signal should vary the peak
output from 0 to 4000W,
with a pulse-on duty cycle
from zero to continuous DC
(100% duty cycle.)
The front panel display
automatically shows pulse
output levels by utilising
sample/hold technology
Front panel controls
Line
RF on
RF off
Output power set
Pulse/CW switch
Remote switches
Menu switches
Front panel indicator
RF power on
RF power off
Front panel display
Vacuum fluorescent display
showing:
Forward (Incident) Power
Reflected Power
Reflected power exceed
limit
Remote operation
Timer
Cooling interlock
External interlock
AMN display (option)
Rear panel
switches/connectors
Remote connector (25-way
‘D’)
Common exciter
output(SMA)
Common exciter
input/external signal
source(SMA)(max. 13dBm)
Pulse input connector
(SMA)
Line input
AMN display(option)
RF output connector (N50
)
Remote control
Accessed via rear panel 25-
way ‘D' type socket
indicators:
RF on/off (open collector
100mA)
Incident power
Reflected power
RF on/off (contact closure)
Interlock (contact closure)
Output set 0-5Volts = 0-
100%
Remote output set request
External feedback
Remote RF on/off request
Cooling
Forced air
– air intake
through front, exhaust
through rear
Line
380-415 VAC Three phase
and Neutral
50/60Hz
Size
Full rack mounting 5U high
550mm deep (external
connectors may protrude an
extra 50mm)
Weight
25kg
Finish
Front Panel -RAL7135 light
grey
Rear Panel - Stainless Steel
Cover - Stainless Steel
Environment
Operating temperature:
0-35°C (-20° to +65° C
storage)
Standards
EN61000-3-2:2006
EN6100-3-3/A2:2005
EN61326-1:2006
EN61010-1:2001
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Safety
Labels
Labels are provided to inform service and operating personnel of conditions that may
cause personal physical injury or damage to the equipment from misuse.
Caution
The black exclamation point within a yellow triangle is used to highlight important
service and operating instructions in this manual
Electric Shock Warning
A black electric flash within a yellow triangle is used to warn service and operating
personnel of the prescience of unprotected contact areas which could cause severe
electric shock if touched.
Safety Earth Warning
This symbol is used to indicate a safety earth attachment point/stud on the rear panel of
the generator.
This safety earth connection must be made, using a green/yellow
insulated wire (14-gauge minimum) and should be as short as practical
Safety earth connections inside the enclosure are identified by the warning label
WARNING
SAFETY EARTH
DO NOT
DISCONNECT
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Unpacking
Items included in carton.
RF Generator.
25 Way remote connector
Instruction Manual
Remove all contents from carton and inspect generator for shipping damage. If there is
any evidence of damage contact Coaxial Power Systems Ltd within 5 days of receipt.
Installation
Installation must only be performed by suitably
qualified authorised personnel.
This generator is designed to be fitted inside a
suitable 19” rack enclosure. It should not be
operated unless so fitted.
Place the generator inside a suitable 19-inch enclosure which must include
adequate runners for support.
Ensure adequate ventilation is available at fan inlet rear panel (100mm
clearance) and top and side vents (20mm clearance.)
Ensure that the Mains Inlet is accessible
Safety
Earth
RF Output
Pulse Input
Common
Exciter Input
Common
Exciter
Output
3 Phase
Mains
Input
Remote
Connector
AMN Display
Input (Optional)
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Connect the 25-Way remote connector into socket on rear panel (factory wired
to bridge external interlock)
Connect the earth stud on the rear panel to a safe reliable earth using a
green/yellow insulated wire (14-gauge minimum) which should be as short as
practical.
Screw the cable connector on to the RF Output connector on the generator.
Attach the other end of the cable to a proprietary 50-Ohm resistive load capable
of 4000 Watts dissipation or a load of different or complex impedance connected
via a suitable RF impedance matching network.
Connect the generator to the 3 Phase mains supply using the supplied mains
connector
.
Always ensure that this connector is easily accessible
.
This generator
operates from voltages in the range of 380V to 415V at 50 or 60Hz without the
need for adjustment.
Ensure Pulse/CW switch on the front panel is in the CW position
Switch on line breaker on front panel. Front display, and RF Off light should
illuminate.
Rotate power set control to zero, press RF On. Rotate power set control towards
maximum and output power should increase. Continue to rotate control to
maximum and check that maximum obtainable power is correct. Press RF Off.
Other rear panel connectors are:
AMN Readout (Optional
)
–
This connection is used when the capacitor positions
and dc developed bias voltage are to be displayed on the generator display. This
can only be used if a suitably equipped CPS automatic impedance matching network
is being used.
CEX Output- see later
Pulse Input
– see later
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Front Panel Controls
Output Set
The control sets the output power, provided the unit is in “local power set”
mode, meaning the remote power switch is in the down position and the remote
power link is not made in the remote control connector.
RF On and Off switches
:
The switches tu
rn the RF output on and off, provided the unit is in “local on/off”
mode, meaning the remote on switch is in the down position and the remote
on/off link is not made in the remote control connector. The RF off switch is also
used to reset a latched interlo
ck condition when the unit is in “local on/off”
mode, and to reset the initial “splash screen”.
Remote control of RF On/Off:
Operating this switch locks out the RF on and off switches on the front panel so
that RF is activated by a circuit on the remote connector.
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Remote control of RF power
Operating this switch locks out the Output set control on the front panel so that
RF power is controlled by a voltage on the remote connector.
Power control divide by ten
This simply reduces the voltage span of the output set control to allow the
setting of powers up to 10% with finer resolution.
Common exciter enable
On units that support this facility this enables a phase-locked-loop that
synchronizes the RF output to a signal on CEX-in
Pulse operation enable
This enables the pulse input facility. If this switch is up then RF can be rapidly
gated by a “TTL” (5v logic) signal on the rear panel pulse input
Display
(a)
The display panel shows the following information:
1. Forward RF power
2. Reflected RF power
3. Set power as a percentage
4. Timer status and progress
5. Matching network tune position
6. Matching network load position
7. Reflected power cutback warning
8. Remote control flag
9. Cooling interlock
10. External interlock
Note that in the event of the RF connector interlock being open this does not
generate a specific warning, however the display will switch to its alternate
“interlock” layout until the connector guard is refitted and the condition reset.
Menu keys: Pressing the middle menu key enters the timer setup menu
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Interlock Indicators
:
Ref. Pwr: this is a warning of a high reflected power level and illuminates if the
reflected power exceeds 16% of the maximum capable generator output.
Cooling: this relates to over temperature of the internal power amplifier
module. If illuminated, RF On will not function until module has reached a safe
temperature
.
NB. This interlock will operate when there is :
Inadequate ventilation
Defective cooling.
RF module fault.
In the event that RF operation is interrupted the interlock state will latch until
cleared by pressing RF off or removing the “Remote RF on” signal.
Ext. interlock: this is operated by connecting the 25 way d connector (remote) on
the rear panel pin 13 to +12V pin 25.
NB. when ext. Interlock (or any other interlock) is not made, the RF Off light will
not illuminate.
Remote: this operates when either remote output set or remote RF On/Off
request are enabled.
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Remote Control connector
The 25 way D type connector on the rear panel allows remote control of the generator.
Below is a description of the various remote functions.
Pin
Function
1
Remote power neg.
14
RF Off light
2
Remote power pos.
15
Enable Remote ON
3
Incident power
16
Enable Aux Feedback
4
Reflected power
17
Enable Remote power
5
Remote RF On
18
-
6
-
19
RF On light
7
Ground
20
-
8
Ground
21
Enable True Power mode
9
Auxiliary feedback neg.
22
-
10
Auxiliary feedback pos.
23
-
11
-
24
-
12
-
25
+12V out for interlock
13
External interlock
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Description Of Remote Status Connections / Functions
Pin 3 Incident power. Pin 3 is an analogue output voltage 0-5 volts representing zero to maximum output
power.
N.B. This output can source 5mA.
Pin 4 Reflected power. Pin 4 is analogue output voltage 0-5 volts representing 0-maximum output power.
N.B. This output can source 5mA.
Pin 14 RF Off light. Pin 9 is an open collector transistor that grounds with RF Off. This can sink 45mA
20V.
Pin 19 RF On light. Pin 9 is a open collector transistor that grounds with RF On. This can sink 45mA
20V.
Pin 20 +5V. This is a +5V 500mA Output.
Pin 7,8 Ground
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Description Of Remote Switching and Power control
Remote RF ON
Remote Output set
Pin 5 RF On/Off. To enable this function connect pin 10 to a ground pin. To enable RF connect pin 5 to a
ground pin, via a switch, transistor or relay. This is not latching, grounding pin 5 will switch RF On, and
removing this ground will switch RF Off.
N.B. Interlock functions will operate normally when using this function.
Pin 15 Remote RF On/Off Switch Enable. Ground this pin to enable the remote RF On/Off control
function, when it is enabled the remote indicator on the front panel is illuminated.
Pins 1,2 Remote power set. To enable this function connect pin 17 to a ground pin. The set-point or
control is a positive voltage in the range 0v to 5v. 0 volts gives zero output power and 5 volts gives
maximum output power.
Pin 17 Remote RF setpoint enable. Ground this pin to enable the remote setpoint control, when it is
enabled the remote indicator on the front panel is illuminated.
Pin 21 True power control enable. Ground this pin to enable “True power” operation. Note this should not
be selected at the same time as remote feedback. When true power is selected the controller
compensates for reflected power by raising the set power.
Pins 7,8 Ground
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Description Of Remote Interlock Connection / Function
Pin 13 External Interlock. When this pin is connected to +12v it allows the generator output to be
switched on. When this pin is open-
circuit the “External” warning light will illuminate.
Pin 25 Positive supply, +12V.
Pin 7,8 Ground
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Description Of Auxiliary feedback Connection / Function
Auxiliary feedback is typically used in vacuum processes in order to control the dark space bias potential.
The following drawing shows the connections to link the CPS RF generator to a CPS automatic matching
network controller.
Pin 9 Auxiliary feedback -ve. To enable this function connect pin 16 to a ground pin. The feedback signal
should be a negative voltage in the range 0v to
–5v. This function is mainly used for plasma dark-space
potential (bias) control.
Pin 10 Auxiliary feedback +ve. To enable this function connect pin 16 to a ground pin. Connect this pin to
ground at the AMN controller
Pin 16 Remote feedback enable. Ground this pin to enable the Pin1 Auxiliary feedback function.
NB. When using the auxiliary feedback facility, if feedback voltage is not present then RF power will rise
to maximum. On plasma systems this is often advantageous as it allows the generator to supply high
power to strike plasma, then cut back to operating level as soon as plasma is struck.
Other functions
Pin 20 +5V. This is a +5V 500mA Output. This may be used as a power source to illuminate LEDS or
power small adapter circuits or displays.
Pin 6 Not Used
Pin 7,8 Ground
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Description Of 3 Phase Mains Input Connection
Round connector pinout
Pin 1 Reserved
Pin 2 Reserved
Pin 3 Live Phase 2
Pin 4 Earth
Pin 5 Live Phase 3
Pin 6 Live Phase 1
Pin 7 Neutral
Neutral is mandatory, failure to provide
a neutral will result in damage
Pulse Operation.
Pulse mode is selected by the Pulse / CW switch on the front panel. The pulse signal
should be TTL (active high). Minimum pulse width is 40
s and with duty cycle from 1%
to CW (duty cycle below 1% will cause power level to deviate from set value). The front
panel displays (and remote outputs) store the last value of output power from the pulse,
maintaining the reading for the duration of the off time.
Cleaning
To clean the surface of the generator turn off and isolate from mains, use a dry clean
cloth. For heavy soiling, slightly dampen the cloth with water but always ensure that no
water enters the generator.
Warranty
Coaxial Power Systems Ltd offer a warranty for parts and labour (if returned to factory)
for 1 year from date of despatch. The warranty is invalidated if the generator has
suffered inappropriate treatment i.e. excessive vibration, mechanical denting or
dropping, accidental liquid spill, excessive applied voltage to remote connectors etc.
Coaxial Power Systems Ltd should be notified of all warranty claims before return of
equipment.
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